2024 article

Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing

Choi, J., Zhu, M., Kang, J., & Jeong, M. K. (2024, March 16). ANNALS OF OPERATIONS RESEARCH.

By: J. Choi *, M. Zhu n, J. Kang & M. Jeong *

author keywords: Convolutional neural networks; Multivariate analysis; Semiconductor manufacturing; Virtual metrology
Source: Web Of Science
Added: March 25, 2024