2024 personal communication
High-current, high-voltage AlN Schottky barrier diodes
Quinones, C. E., Khachariya, D., Reddy, P., Mita, S., Almeter, J., Bagheri, P., … Sitar, Z. (2024, October 1).
Abstract AlN Schottky barrier diodes with low ideality factor (<1.2), high current density (>5 kA/cm 2 ), and high breakdown voltage (680 V) are reported. The quasi-vertical device structure consisted of a lightly-doped AlN drift layer and a heavily-doped Al 0.75 Ga 0.25 N ohmic contact layer grown on AlN substrates. A combination of simulation, current-voltage measurements, and impedance spectroscopy analysis revealed that the AlN/AlGaN interface introduces a parasitic electron barrier due to the conduction band offset between the two materials. We show that introducing a compositionally-graded layer reduces the interfacial barrier and increases the forward current density of fabricated diodes by a factor of 10 4 .