2018 conference paper

Design and Implementation of Wideband CMUTs for Airborne Applications - Preliminary Results

2018 IEEE International Ultrasonics Symposium (IUS). Presented at the 2018 IEEE International Ultrasonics Symposium (IUS).

co-author countries: United States of America 🇺🇸

Event: 2018 IEEE International Ultrasonics Symposium (IUS)

Source: Crossref
Added: March 24, 2019

This paper describes the design and fabrication of an annular and a spiral shaped air-coupled CMUT with improved bandwidth for airborne applications. We optimized the width of each ring in the annular design and used the same parameter for the spiral design to achieve broader bandwidth air-coupled CMUTs. Using anodic bonding, a 25-μm vibrating silicon plate was bonded to a borosilicate glass wafer with up to 14.75 μm deep cavities. The fabricated devices show an atmospheric deflection between 6 μm to 10 μm depending on the size of each ring which shows that the fabricated devices were vacuum sealed. The fabricated devices show a resonance frequency of 87 kHz and up to 12% 6-dB fractional bandwidth in air.