2006 journal article

Effect of thermal annealing on the metastable optical properties of GaN thin films

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 24(4), 1051–1054.

co-author countries: Taiwan, Province of China 🇹🇼
Source: Web Of Science
Added: August 6, 2018

The optical metastability in unintentionally doped GaN (0001) films grown on AlN∕SiC substrates has been investigated as a function of thermal annealing conditions using photoluminescence and optical microscopy. Annealing at 800°C for 48h in 1atm of flowing nitrogen produced no change in the metastability. Annealing at 800°C in ultrahigh vacuum for 48h eliminated the phenomenon. Exposure of the sample to ultraviolet light during the latter anneal reduced the time to eliminate the metastability. This phenomenon was restored by subsequently annealing in ammonia at 775°C for 3h. These results suggest that the presence and elimination of the optical metastability are related to the presence in and the elimination of hydrogen from the GaN.