2018 conference paper

Building Blocks of a New ALD E-Nose - A First Step: N-Type and P-Type ALD Sensors

2018 IEEE SENSORS. Presented at the 2018 IEEE Sensors.

co-author countries: United States of America πŸ‡ΊπŸ‡Έ

Event: 2018 IEEE Sensors

Source: Crossref
Added: July 7, 2020

We constructed the basic building blocks of a new type of low-power sensor array with an n-type SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> sensor and p-type CuO sensor. Both sensors have sensing film deposited by atomic layer deposition with thickness of 6.5 nm for SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and 20 nm for CuO, which are in an order thickness of their respective Debye lengths. Unique response values for ozone and acetone were seen with SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and CuO in the tested concentration ranges while CuO was seen to be more selective to humidity than SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> . The impact, reason for choosing these building blocks and the mathematical rationale behind choosing relevant data features are discussed.