2011 journal article

Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 158(5), H530–H535.

By: R. Dalmau*, B. Moody*, R. Schlesser*, S. Mita*, J. Xie*, M. Feneberg*, B. Neuschl*, K. Thonke* ...

co-author countries: Germany 🇩🇪 United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfaces.