2016 journal article

Study on a flexoelectric microphone using barium strontium titanate

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 26(4).

By: S. Kwon*, W. Huang n, S. Zhang*, F. Yuan n & X. Jiang n

co-author countries: Korea (Republic of) 🇰🇷 United States of America 🇺🇸
author keywords: flexoelectricity; microphone; barium strontium titanate; micro-bridge
Source: Web Of Science
Added: August 6, 2018

In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm × 768 μm × 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.