This work demonstrates room temperature sensing of volatile organic compound (VOC) — acetone via an ultrathin film metal oxide sensing layer. Atomic layer deposition (ALD) enables a high quality ultrathin film with precise thickness control. The 14nm ultrathin SnO2 thin film was deposited by ALD resulting in VOCs sensing at room temperature. The ultra-low power consumption (less than 50nW) and the room temperature operation of these devices make them compatible with wearable devices for real-time health and environment monitoring.