2018 conference paper

Highly Sensitive ALD SnO2 Sensors and the Role of its Thickness in Gas Sensing Capabilities

2018 IEEE SENSORS. Presented at the 2018 IEEE Sensors.

co-author countries: United States of America πŸ‡ΊπŸ‡Έ

Event: 2018 IEEE Sensors

Source: Crossref
Added: July 7, 2020

We report superior gas sensing properties of nano-layered atomic layer deposited - tin oxide thin films with room temperature operation and discuss the role of thickness on the sensing response of the films. 25, 50, 100 cycles of tin oxide ALD films have been evaluated for response with ozone gas in the concentration range of 25 ppb-l00 ppb. At 75 ppb of ozone, relevant concentration indicated for an Asthma attack, a remarkable increase in sensitivity by 22 times is seen with the 50 cycles ALD SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> sensor over the 100 cycles sensor and an increase of 58 times, with the 25 cycles sensor over the 50 cycles sensor. The operating power per sensor was under 200 ΞΌW including the power consumed by an UV LED (385 nm wavelength) used for resetting the sensors' baseline resistances.