2012 journal article

A Markov chain framework for cycle time approximation of toolsets

IEEE Transactions on Semiconductor Manufacturing, 25(4), 589–597.

By: R. Akhavan-Tabatabaei, Y. Fathi & J. Shanthikumar

10.1109/tsm.2012.2202252
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Source: NC State University Libraries
Added: August 6, 2018