2021 journal article

AFM-Based nanofabrication and quality inspection of three-dimensional nanotemplates for soft lithography

JOURNAL OF MANUFACTURING PROCESSES, 66, 565–573.

By: J. Deng *, L. Jiang *, B. Si*, H. Zhou *, J. Dong  & P. Cohen n

Source: Web Of Science
Added: June 10, 2021