2016 | conference paper

High rate 3D nanofabrication by AFM-based ultrasonic vibration assisted nanomachining

In 44th north american manufacturing research conference, namrc 44 (Vol. 5, pp. 1283–1294).

By: J. Deng, J. Dong & P. Cohen

10.1016/j.promfg.2016.08.100
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Source: NC State University Libraries
Added: August 6, 2018