2016 | journal article

AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining

Journal of Manufacturing Processes, 24, 195–202.

By: J. Deng, L. Zhang, J. Dong & P. Cohen

10.1016/j.jmapro.2016.09.003
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Unpaywall icon manuscript.elsevier.com (publisher PDF)
Source: NC State University Libraries
Added: August 6, 2018