Works (5)
Updated: August 16th, 2024 13:38
1999 journal article
Bias dependent contrast mechanisms in EBIC images of MOS capacitors
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(4), 1529–1535.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1998 journal article
Directional copper deposition using dc magnetron self-sputtering
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(3), 1102–1106.
Source: NC State University Libraries
Added: August 6, 2018
1998 article
Medium field breakdown origin on metal oxide semiconductor capacitor containing grown-in Czochralski silicon crystal defects
Tamatsuka, M., Radzimski, Z., Rozgonyi, G. A., Oka, S., Kato, M., & Kitagawara, Y. (1998, March). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol. 37, pp. 1236–1239.
author keywords: grown-in defect; oxide breakdown; electron beam induced current; vacancy cluster; focused ion beam; local tunneling current; Fowler-Nordheim tunneling current
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1997 journal article
Metallic impurity gettering and secondary defect formation in megaelectron volt self-implanted Czochralski and float-zone silicon
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144(8), 2872–2881.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1997 article
The effect of oxygen on secondary defect formation in MeV self-implanted silicon
Brown, R. A., Kononchuk, O., Radzimski, Z., Rozgonyi, G. A., & Gonzalez, F. (1997, May). NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol. 127, pp. 55–58.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
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