1997 article

Optimization of Process Conditions for Selective Silicon Epitaxy Using Disilane, Hydrogen, and Chlorine

O'Neil, P. A., Öztürk, M. C., Violette, K. E., Batchelor, D., Christensen, K., & Maher, D. M. (1997, September 1). Journal of The Electrochemical Society.

By: P. O'Neil n, M. Öztürk n, K. Violette n, D. Batchelor n, K. Christensen n & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Thin-Film Transistor Technologies; Semiconductor materials and devices
Source: Web Of Science
Added: August 6, 2018

1996 article

Sub-Half Micron Elevated SourceDrain NMOSFETS by Low Temperature Selective Epitaxial Deposition

Sun, J., Bartholomew, R. F., Bellur, K., O'Neil, P. A., Srivastava, A., Violette, K. E., … Masnari, N. A. (1996, January 1). MRS Proceedings.

Ed(s):

topics (OpenAlex): Semiconductor materials and devices; Advancements in Semiconductor Devices and Circuit Design; Thin-Film Transistor Technologies
Source: Web Of Science
Added: August 6, 2018

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