@article{wolfe_hinds_wang_lucovsky_ward_xu_nemanich_maher_1999, title={Thermochemical stability of silicon-oxygen-carbon alloy thin films: A model system for chemical and structural relaxation at SiC-SiO2 interfaces}, volume={17}, DOI={10.1116/1.581745}, number={4}, journal={Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films}, author={Wolfe, D. M. and Hinds, B. J. and Wang, F. and Lucovsky, G. and Ward, B. L. and Xu, M. and Nemanich, R. J. and Maher, D. M.}, year={1999}, pages={2170–2177} } @article{hinds_wang_wolfe_hinkle_lucovsky_1998, title={Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition}, volume={16}, number={4}, journal={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Hinds, B. J. and Wang, F. and Wolfe, D. M. and Hinkle, C. L. and Lucovsky, G.}, year={1998}, pages={2171–2176} } @article{wolfe_wang_habermehl_lucovsky_1998, title={Low-temperature (<450 degrees C), plasma-assisted deposition of poly-Si thin films on SiO2 and glass through interface engineering (vol 15, pg 1035, 1997)}, volume={16}, number={1}, journal={Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films}, author={Wolfe, D. M. and Wang, F. and Habermehl, S. and Lucovsky, G.}, year={1998}, pages={207} } @article{hinds_wang_wolfe_hinkle_lucovsky_1998, title={Study of SiOx decomposition kinetics and formation of Si nanocrystals in an SiOx matrix}, volume={230 (part A)}, number={1998 May}, journal={Journal of Non-crystalline Solids}, author={Hinds, B. J. and Wang, F. and Wolfe, D. M. and Hinkle, C. L. and Lucovsky, G.}, year={1998}, pages={507–512} } @article{wolfe_wang_lucovsky_1997, title={Low-temperature (less than 450 degrees), plasma-assisted deposition of poly-si thin films on SiO(2) and glass through interface engineering}, volume={15}, DOI={10.1116/1.580426}, number={3 pt. 1}, journal={Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films}, author={Wolfe, D. M. and Wang, F. and Lucovsky, G.}, year={1997}, pages={1035–1040} }