@misc{palmour_1991, title={Dry etching of silicon carbide}, volume={4981551}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Palmour, J. W.}, year={1991} } @misc{palmour_edmond_1990, title={Bipolar junction transistor on silicon carbide}, volume={4945394}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Palmour, J. W. and Edmond, J. A.}, year={1990} } @misc{palmour_1989, title={Dry etching of silicon carbide}, volume={4865685}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Palmour, J. W.}, year={1989} } @misc{palmour_1989, title={Metal-insulator-semiconductor capacitor formed on silicon carbide}, volume={4875083}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Palmour, J. W.}, year={1989} }