2008 article

Focused ion beam irradiation effects on nanoscale freestanding thin films

Samayoa, M. J., Haque, M. A., & Cohen, P. H. (2008, July 24). Journal of Micromechanics and Microengineering, Vol. 18.

By: M. Samayoa n, M. Haque* & P. Cohen n

topics (OpenAlex): Integrated Circuits and Semiconductor Failure Analysis; Advanced Surface Polishing Techniques; Ion-surface interactions and analysis
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

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