Works (8)
1999 journal article
Evolution of deep-level centers in p-type silicon following ion implantation at 85 K
APPLIED PHYSICS LETTERS, 74(9), 1263–1265.
1999 journal article
Lateral gettering of Fe on bulk and silicon-on-insulator wafers
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(5), 1925–1928.
1999 journal article
Simulation of metallic impurity gettering in silicon by MeV ion implantation
Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors, and Associated Equipment, 148(1-4), 322–328.
1998 journal article
Combined MOS/EBIC and TEM study of electrically active defects in SOI wafers
Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 63-4(1998), 61–67.
1998 journal article
Diffusion of iron in the silicon dioxide layer of silicon-on-insulator structures
APPLIED PHYSICS LETTERS, 73(9), 1206–1208.
1998 journal article
Impurity gettering to secondary defects created by MeV ion implantation in silicon
JOURNAL OF APPLIED PHYSICS, 84(5), 2459–2465.
1997 journal article
Gettering of iron in silicon-on-insulator wafers
APPLIED PHYSICS LETTERS, 71(8), 1107–1109.
1997 journal article
Metallic impurity gettering and secondary defect formation in megaelectron volt self-implanted Czochralski and float-zone silicon
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144(8), 2872–2881.