@inbook{holten_hauser_kim_lynch_2000, title={Overview of semiconductor devices}, booktitle={Handbook of semiconductor manufacturing technology}, publisher={New York: Marcel Dekker}, author={Holten, W. C. and Hauser, J. R. and Kim, K. W. and Lynch, W. T.}, editor={Y. Nishi and Doering, R.Editors}, year={2000} }