@article{walker_nordquist_czaplewski_patrizi_mcgruer_krim_2010, title={Impact of in situ oxygen plasma cleaning on the resistance of Ru and Au-Ru based rf microelectromechanical system contacts in vacuum}, volume={107}, number={8}, journal={Journal of Applied Physics}, author={Walker, M. and Nordquist, C. and Czaplewski, D. and Patrizi, G. and McGruer, N. and Krim, J.}, year={2010} }