Works (1)

Updated: April 11th, 2023 10:13

1999 journal article

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)

APPLIED PHYSICS LETTERS, 75(25), 4001–4003.

By: T. Klein, D. Niu, W. Epling n, W. Li, D. Maher, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons

Source: Web Of Science
Added: August 6, 2018