Wenmei Li

Works (1)

Updated: July 5th, 2023 16:02

1999 journal article

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)

APPLIED PHYSICS LETTERS, 75(25), 4001–4003.

By: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

Contributors: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

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Added: August 6, 2018

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