Wenmei Li

Klein, T. M., Niu, D., Epling, W. S., Li, W., Maher, D. M., Hobbs, C. C., … Parsons, G. N. (1999). Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100). APPLIED PHYSICS LETTERS, 75(25), 4001–4003. https://doi.org/10.1063/1.125519