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Method of removing residual contaminants from an environment. Washington, DC: U.S. Patent and Trademark Office. Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., … Zheng, L. A. (2007). Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition. Washington, DC: U.S. Patent and Trademark Office. Basceri, C., & Sandhu, G. (2007). Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer. Washington, DC: U.S. Patent and Trademark Office. Basceri, C., Visokay, M., Graettinger, T. M., & Cummings, S. D. (2007). Methods for forming and integrated circuit structures containing enhanced-surface-area conductive layers. Washington, DC: U.S. Patent and Trademark Office. Agarwal, V. K., Derderian, G., Sandhu, G. S., Li, W. M., Visokay, M., Basceri, C., & Yang, S. (2007). 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