Kevin Lloyd Beaman

Works (3)

Updated: July 5th, 2023 16:02
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2000 article

Gettering issues using MeV ion implantation

Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.

By: G. Rozgonyi*, J. Glasko*, K. Beaman* & S. Koveshnikov

author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon

Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247–252.

By: K. Beaman, J. Glasko, S. Koveshnikov & G. Rozgonyi

Source: NC State University Libraries
Added: August 6, 2018

1999 journal article

Lateral gettering of Fe on bulk and silicon-on-insulator wafers

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(5), 1925–1928.

By: K. Beaman n, O. Kononchuk n, S. Koveshnikov n, C. Osburn n & G. Rozgonyi n

Source: Web Of Science
Added: August 6, 2018