2000 journal article

Gettering issues using MeV ion implantation

Materials Science & Engineering. B, Solid-State Materials for Advanced Technology, 72(2-3), 87–92.

By: G. Rozgonyi, J. Glasko, K. Beaman & S. Koveshnikov

Source: NC State University Libraries
Added: August 6, 2018

1999 journal article

Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon

Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247–252.

By: K. Beaman, J. Glasko, S. Koveshnikov & G. Rozgonyi

Source: NC State University Libraries
Added: August 6, 2018

1999 journal article

Lateral gettering of Fe on bulk and silicon-on-insulator wafers

Journal of the Electrochemical Society, 146(5), 1925–1928.

By: K. Beaman, O. Kononchuk, S. Koveshnikov, C. Osburn & G. Rozgonyi

Source: NC State University Libraries
Added: August 6, 2018