Kevin Lloyd Beaman

Works (3)

Updated: July 5th, 2023 16:02

2000 article

Gettering issues using MeV ion implantation

Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 1). Materials Science and Engineering B.

By: G. Rozgonyi n, J. Glasko n, K. Beaman n & S. Koveshnikov

author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
topics (OpenAlex): Silicon and Solar Cell Technologies; Ion-surface interactions and analysis; Semiconductor materials and interfaces
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Source: Web Of Science
Added: August 6, 2018

1999 journal article

Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon

Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247–252.

By: K. Beaman, J. Glasko, S. Koveshnikov & G. Rozgonyi

Source: NC State University Libraries
Added: August 6, 2018

1999 article

Lateral Gettering of Fe on Bulk and Silicon‐on‐Insulator Wafers

Beaman, K. L., Kononchuk, O., Koveshnikov, S., Osburn, C. M., & Rozgonyi, G. A. (1999, May 1). Journal of The Electrochemical Society.

By: K. Beaman n, O. Kononchuk n, S. Koveshnikov n, C. Osburn n & G. Rozgonyi n

topics (OpenAlex): Advanced Surface Polishing Techniques; Silicon and Solar Cell Technologies; Semiconductor materials and devices
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UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

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