Kevin Lloyd Beaman

Works (3)

Download BibTeX Download Plain Text View JSON

2000 article

Gettering issues using MeV ion implantation

Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.

By: G. Rozgonyi, J. Glasko, K. Beaman & S. Koveshnikov*

author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon

Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247–252.

By: K. Beaman, J. Glasko, S. Koveshnikov & G. Rozgonyi

Source: NC State University Libraries
Added: August 6, 2018

1999 journal article

Lateral gettering of Fe on bulk and silicon-on-insulator wafers

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(5), 1925–1928.

By: K. Beaman, O. Kononchuk, S. Koveshnikov, C. Osburn & G. Rozgonyi

Source: Web Of Science
Added: August 6, 2018