Works (3)
Updated: July 5th, 2023 16:02
2000 article
Gettering issues using MeV ion implantation
Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.
author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1999 journal article
Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon
Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247–252.
Source: NC State University Libraries
Added: August 6, 2018
1999 journal article
Lateral gettering of Fe on bulk and silicon-on-insulator wafers
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(5), 1925–1928.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
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