Works (2)
Updated: July 5th, 2023 16:01
2001 journal article
Dissociation reactions of hydrogen in remote plasma-enhanced chemical-vapor-deposition silicon nitride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 19(5), 2622–2628.
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2000 journal article
H loss mechanism during anneal of silicon nitride: Chemical dissociation
JOURNAL OF APPLIED PHYSICS, 88(10), 6055–6059.
Source: Web Of Science
Added: August 6, 2018
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