Works (3)
Updated: July 5th, 2023 16:03
1999 journal article
Low thermal budget surface preparation for selective epitaxy a study on process robustness
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(4), 1557–1564.
open access via jes.ecsdl.org (publisher PDF)
Source: Web Of Science
Added: August 6, 2018
1998 journal article
Low thermal budget in situ surface cleaning for selective silicon epitaxy
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 145(10), 3602–3609.
Source: Web Of Science
Added: August 6, 2018
1997 conference paper
A 0.18 ?m CMOS technology for elevated source/drain MOSFETs using selective silicon epitaxy
ULSI science and technology/1997: Proceedings of the Sixth International Symposium on UltraLarge Scale Integration Science and Technology (Proceedings (Electrochemical Society); v. 97-3), 571–585. Pennington, NJ: Electrochemical Society.
Source: NC State University Libraries
Added: August 6, 2018
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