Works (3)

1999 journal article

Low thermal budget surface preparation for selective epitaxy a study on process robustness

Journal of the Electrochemical Society, 146(4), 1557–1564.

By: S. Celik & M. Ozturk

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Low thermal budget in situ surface cleaning for selective silicon epitaxy

Journal of the Electrochemical Society, 145(10), 3602–3609.

By: S. Celik & M. Ozturk

Source: NC State University Libraries
Added: August 6, 2018

1997 conference paper

A 0.18 ?m CMOS technology for elevated source/drain MOSFETs using selective silicon epitaxy

ULSI science and technology/1997: Proceedings of the Sixth International Symposium on UltraLarge Scale Integration Science and Technology (Proceedings (Electrochemical Society); v. 97-3), 571–585. Pennington, NJ: Electrochemical Society.

By: A. Srivastava, J. Sun, K. Bellur, R. Bartholomew, P. O'Neil, S. Celik, C. Osburn, N. Masnari ...

Source: NC State University Libraries
Added: August 6, 2018