Tonya M. Klein

Works (4)

Updated: July 5th, 2023 16:03

2001 article

Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon

Chambers, J. J., Busch, B. W., Schulte, W. H., Gustafsson, T., Garfunkel, E., Wang, S., … Parsons, G. N. (2001, September 1). Applied Surface Science, Vol. 181, pp. 78–93.

By: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel *, S. Wang n, D. Maher n, T. Klein*, G. Parsons n 

Contributors: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel *, S. Wang n, D. Maher n, T. Klein*, G. Parsons n 

author keywords: X-ray photoelectron spectroscopy; transmission electron microscopy; capacitance-voltage curve
topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Semiconductor materials and interfaces
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1999 article

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)

Klein, T. M., Niu, D., Epling, W. S., Li, W., Maher, D. M., Hobbs, C. C., … Parsons, G. N. (1999, December 20). Applied Physics Letters, Vol. 75, pp. 4001–4003.

By: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

Contributors: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Ion-surface interactions and analysis
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1999 article

Hydrogenated silicon nitride thin films deposited between 50 and 250 °C using nitrogen/silane mixtures with helium dilution

Klein, T. M., Anderson, T. M., Chowdhury, A. I., & Parsons, G. N. (1999, January 1). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 17, pp. 108–112.

By: T. Klein n, T. Anderson n, A. Chowdhury n & G. Parsons n 

Contributors: T. Klein n, T. Anderson n, A. Chowdhury n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Thin-Film Transistor Technologies; ZnO doping and properties
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1998 article

Silane consumption and conversion analysis in amorphous silicon and silicon nitride plasma deposition using in situ mass spectroscopy

Chowdhury, A. I., Klein, T. M., Anderson, T. M., & Parsons, G. N. (1998, May 1). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 16, pp. 1852–1856.

By: A. Chowdhury n, T. Klein n, T. Anderson n & G. Parsons n 

Contributors: A. Chowdhury n, T. Klein n, T. Anderson n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Ion-surface interactions and analysis
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

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