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L., Zollner, S., Konkar, A., Linthicum, K. J., … Davis, R. F. (2000). Crystallinity and microstructures of aluminum nitride films deposited on Si(111) substrates. SOLID-STATE ELECTRONICS, 44(4), 747–755. https://doi.org/10.1016/S0038-1101(99)00307-X Suvkhanov, A., Parikh, N., Usov, I., Hunn, J., Withrow, S., Thomson, D., … Krasnobaev, L. Y. (2000). Influence of annealing conditions on dopant activation of Si+ and Mg+ implanted GaN. Materials Science Forum, 338(3), 1615–1618. Ronning, C., Dalmer, M., Uhrmacher, M., Restle, M., Vetter, U., Ziegeler, L., … Davis, R. F. (2000). Ion implanted dopants in GaN and AlN: Lattice sites, annealing behavior, and defect recovery. JOURNAL OF APPLIED PHYSICS, 87(5), 2149–2157. https://doi.org/10.1063/1.372154 Davis, R. F., Nam, O. H., Zheleva, T. S., Gehrke, T., Linthicum, K. J., & Rajagopal, P. (2000). Lateral- and pendeo-epitaxial growth and defect reduction in GaN thin films. Materials Science Forum, 338(3), 1471–1476. Davis, R. 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