Works (5)

Updated: July 5th, 2023 16:02

2000 article

Selective Area Chemical Vapor Deposition of Si[sub 1−x]Ge[sub x] Thin Film Alloys by the Alternating Cyclic Method: A Thermodynamic Analysis. I. The System Si-Ge-Cl-H

Soman, R., Reisman, A., & Temple, D. (2000, January 1). Journal of The Electrochemical Society.

By: R. Soman n, A. Reisman n & D. Temple n

topics (OpenAlex): Semiconductor materials and interfaces; Semiconductor materials and devices; Copper Interconnects and Reliability
Source: Web Of Science
Added: August 6, 2018

2000 article

Selective Area Chemical Vapor Deposition of Si[sub 1−x]Ge[sub x] Thin Film Alloys by the Alternating Cyclic Method: A Thermodynamic Analysis. II. The System Si-Ge-Cl-H-Ar

Soman, R., Reisman, A., & Temple, D. (2000, January 1). Journal of The Electrochemical Society.

By: R. Soman n, A. Reisman n & D. Temple n

topics (OpenAlex): Semiconductor materials and interfaces; Semiconductor materials and devices; Copper Interconnects and Reliability
Source: Web Of Science
Added: August 6, 2018

2000 article

Selective Area Chemical Vapor Deposition of Si[sub 1−x]Ge[sub x] Thin Film Alloys by the Alternating Cyclic Method: Experimental Data: I. Deposition Parameters

Soman, R., Reisman, A., Temple, D., & Alberti, R. (2000, January 1). Journal of The Electrochemical Society.

By: R. Soman n, A. Reisman n, D. Temple n & R. Alberti

topics (OpenAlex): Semiconductor materials and devices; Thin-Film Transistor Technologies; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

2000 article

Selective Area Chemical Vapor Deposition of Si[sub 1−x]Ge[sub x] Thin Film Alloys by the Alternating Cyclic Method: Experimental Data: II. Morphology and Composition as a Function of Deposition Parameters

Soman, R., Reisman, A., Temple, D., Alberti, R., & Pace, C. (2000, January 1). Journal of The Electrochemical Society.

By: R. Soman n, A. Reisman n, D. Temple n, R. Alberti & C. Pace*

topics (OpenAlex): Thin-Film Transistor Technologies; Semiconductor materials and interfaces; Semiconductor materials and devices
Source: Web Of Science
Added: August 6, 2018

1999 article

An Alternative Derivation for the Equilibrium Constant of Binary Solid Solution‐Vapor Systems

Soman, R., Reisman, A., & Temple, D. (1999, October 1). Journal of The Electrochemical Society.

By: R. Soman n, A. Reisman n & D. Temple n

topics (OpenAlex): Surface and Thin Film Phenomena; Molecular Junctions and Nanostructures; Chemical and Physical Properties of Materials
Source: Web Of Science
Added: August 6, 2018

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