Works (5)

2000 journal article

Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: A thermodynamic analysis I. The system Si-Ge-Cl-H

Journal of the Electrochemical Society, 147(11), 4333–4341.

By: R. Soman, A. Reisman & D. Temple

Source: NC State University Libraries
Added: August 6, 2018

2000 journal article

Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: A thermodynamic analysis II. The system Si-Ge-Cl-H-Ar

Journal of the Electrochemical Society, 147(11), 4342–4344.

By: R. Soman, A. Reisman & D. Temple

Source: NC State University Libraries
Added: August 6, 2018

2000 journal article

Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: Experimental data I. Deposition parameters

Journal of the Electrochemical Society, 147(5), 1847–1853.

By: R. Soman, A. Reisman, D. Temple & R. Alberti

Source: NC State University Libraries
Added: August 6, 2018

2000 journal article

Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: Experimental data II. Morphology and composition as a function of deposition parameters

Journal of the Electrochemical Society, 147(5), 1854–1858.

By: R. Soman, A. Reisman, D. Temple, R. Alberti & C. Pace

Source: NC State University Libraries
Added: August 6, 2018

1999 journal article

An alternative derivation for the equilibrium constant of binary solid solution-vapor systems

Journal of the Electrochemical Society, 146(10), 3817–3818.

By: R. Soman, A. Reisman & D. Temple

Source: NC State University Libraries
Added: August 6, 2018