Works (5)
Updated: July 5th, 2023 16:02
2000 journal article
Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: A thermodynamic analysis I. The system Si-Ge-Cl-H
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(11), 4333–4341.
Source: Web Of Science
Added: August 6, 2018
2000 journal article
Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: A thermodynamic analysis II. The system Si-Ge-Cl-H-Ar
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(11), 4342–4344.
Source: Web Of Science
Added: August 6, 2018
2000 journal article
Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: Experimental data I. Deposition parameters
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(5), 1847–1853.
Source: Web Of Science
Added: August 6, 2018
2000 journal article
Selective area chemical vapor deposition of Si1-xGex thin film alloys by the alternating cyclic method: Experimental data II. Morphology and composition as a function of deposition parameters
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(5), 1854–1858.
open access via jes.ecsdl.org (publisher PDF)
UN Sustainable Development Goal Categories
11. Sustainable Cities and Communities
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1999 journal article
An alternative derivation for the equilibrium constant of binary solid solution-vapor systems
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(10), 3817–3818.
Source: Web Of Science
Added: August 6, 2018
Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.
Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.