Rainer Loesing

Works (3)

Updated: July 5th, 2023 16:02

2002 article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.

By: R. Loesing n, G. Guryanov n, M. Phillips n & D. Griffis n

Source: Web Of Science
Added: August 6, 2018

2000 chapter

Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants

In D. B. Williams & R. Shimizu (Eds.), Microbeam Analysis 2000: proceedings of the Second Conference of the International Union of Microbeam Analysis Societies held in Kailua-Kona, Hawaii, 9-14 July 2000 (Vol. 165, pp. 327–328). Bristol: Institute of Physics Publishing.

By: J. Hunter, T. Bates, S. Patel, R. Loesing, G. Guraynov & D. Griffis

Ed(s): D. Williams & R. Shimizu

Source: NC State University Libraries
Added: August 6, 2018

2000 article

Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 509–513.

By: R. Loesing n, G. Guryanov n, J. Hunter & D. Griffis n

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Source: Web Of Science
Added: August 6, 2018

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