2002 journal article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507–511.

By: R. Loesing, G. Guryanov, M. Phillips & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2000 chapter

Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants

In Microbeam Analysis 2000: proceedings of the Second Conference of the International Union of Microbeam Analysis Societies held in Kailua-Kona, Hawaii, 9-14 July 2000 (Vol. 165, pp. 327–328). Bristol: Institute of Physics Publishing.

By: J. Hunter, T. Bates, S. Patel, R. Loesing, G. Guraynov & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2000 journal article

Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(1), 509–513.

By: R. Loesing, G. Guryanov, J. Hunter & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018