Georgiy M. Guryanov

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507–511.

Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(1), 509–513.