Georgiy M. Guryanov

Loesing, R., Guryanov, G. M., Phillips, M. S., & Griffis, D. P. (2002). Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511. https://doi.org/10.1116/1.1450588

Loesing, R., Guryanov, G. M., Hunter, J. L., & Griffis, D. P. (2000). Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 509–513. https://doi.org/10.1116/1.591222