Works (4)
2002 journal article
Low-temperature Ar/N-2 remote plasma nitridation of SiO2 thin films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 20(6), 1989–1996.
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2002 journal article
Reaction pathways in remote plasma nitridation of ultrathin SiO2 films
JOURNAL OF APPLIED PHYSICS, 91(1), 48–55.
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2001 journal article
Nitrogen incorporation in ultrathin gate dielectrics: A comparison of He/N2O and He/N-2 remote plasma processes
JOURNAL OF APPLIED PHYSICS, 90(6), 3100–3108.
2000 article
Ar/N2O remote plasma-assisted oxidation of Si(100): Plasma chemistry, growth kinetics, and interfacial reactions
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 1757–1763.