John Randolph Phillips

Works (1)

Updated: July 5th, 2023 16:01

2000 article

Channeling effects during focused-ion-beam micromachining of copper

Phillips, J. R., Griffis, D. P., & Russell, P. E. (2000, July 1). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.

By: J. Phillips n, D. Griffis n & P. Russell n

topics (OpenAlex): Advanced Surface Polishing Techniques; Integrated Circuits and Semiconductor Failure Analysis; Ion-surface interactions and analysis
Source: Web Of Science
Added: August 6, 2018

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