Works (1)
Updated: July 5th, 2023 16:00
2001 journal article
Recent progress in electron-beam a resists for advanced mask-making
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 45(5), 639–650.
UN Sustainable Development Goal Categories
9. Industry, Innovation and Infrastructure
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
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