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Yoganand, S. N., Raghuveer, M. S., Jagannadham, K., Wu, L., Karoui, A., & Rozgonyi, G. (2002). Multilayer TiC/TiN diffusion barrier films for copper. APPLIED PHYSICS LETTERS, 80(1), 79–81. https://doi.org/10.1063/1.1430027