Works (2)

2002 | journal article

Improvements in focused ion beam micromachining of interconnect materials

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(6), 2700–2704.

By: J. Gonzalez, M. Da Silva, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2001 | journal article

Chemically enhanced focused ion beam micromachining of copper

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 19(6), 2539–2542.

By: J. Gonzalez, D. Griffis, T. Miau & P. Russell

Source: NC State University Libraries
Added: August 6, 2018