2002 article

Improvements in focused ion beam micromachining of interconnect materials

Gonzalez, J. C., Silva, M. I. N., Griffis, D. P., & Russell, P. E. (2002, November 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.

By: J. Gonzalez n, M. Silva n, D. Griffis n & P. Russell n

topics (OpenAlex): Integrated Circuits and Semiconductor Failure Analysis; Electron and X-Ray Spectroscopy Techniques; Ion-surface interactions and analysis
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2001 article

Chemically enhanced focused ion beam micromachining of copper

Gonzalez, J. C., Griffis, D. P., Miau, T. T., & Russell, P. E. (2001, November 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.

By: J. Gonzalez n, D. Griffis n, T. Miau* & P. Russell n

topics (OpenAlex): Integrated Circuits and Semiconductor Failure Analysis; Advanced Surface Polishing Techniques; Ion-surface interactions and analysis
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

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