2002 article

Improvements in focused ion beam micromachining of interconnect materials

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 2700–2704.

By: J. Gonzalez, M. Silva, D. Griffis & P. Russell

Source: Web Of Science
Added: August 6, 2018

2001 article

Chemically enhanced focused ion beam micromachining of copper

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 19, pp. 2539–2542.

By: J. Gonzalez, D. Griffis, T. Miau & P. Russell

Source: Web Of Science
Added: August 6, 2018