Works (2)
2002 article
Improvements in focused ion beam micromachining of interconnect materials
Gonzalez, J. C., Silva, M. I. N., Griffis, D. P., & Russell, P. E. (2002, November 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.
2001 article
Chemically enhanced focused ion beam micromachining of copper
Gonzalez, J. C., Griffis, D. P., Miau, T. T., & Russell, P. E. (2001, November 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.