Works (2)

Updated: July 5th, 2023 16:00

2002 article

Improvements in focused ion beam micromachining of interconnect materials

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 2700–2704.

By: J. Gonzalez n, M. Silva n, D. Griffis n & P. Russell n

Source: Web Of Science
Added: August 6, 2018

2001 article

Chemically enhanced focused ion beam micromachining of copper

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 19, pp. 2539–2542.

By: J. Gonzalez n, D. Griffis n, T. Miau* & P. Russell n

Source: Web Of Science
Added: August 6, 2018