You-Seok Suh

Works (7)

Updated: July 5th, 2023 16:00

2005 journal article

Electrical characteristics of HfO2 dielectrics with Ru metal gate electrodes

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(9), F138–F141.

By: Y. Suh n, H. Lazar n, B. Chen  n, J. Lee n & V. Misra n 

Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2005 journal article

Physical and electrical analysis of RuxYy alloys for gate electrode applications

APPLIED PHYSICS LETTERS, 86(5).

By: B. Chen n, Y. Suh n, J. Lee n, J. Gurganus n, V. Misra n  & C. Cabral *

Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2004 journal article

Characteristics of TaSixNy thin films as gate electrodes for dual gate Si-complementary metal-oxide-semiconductor devices

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 22(1), 175–179.

By: Y. Suh n, G. Heuss n & V. Misra n 

Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2004 journal article

Investigation of stress behaviors and mechanism of void formation in sputtered TiSix films

THIN SOLID FILMS, 450(2), 341–345.

By: Y. Suh*, D. Park & S. Jang

author keywords: TiSix films; substrate temperature; stress behaviors
Source: Web Of Science
Added: August 6, 2018

2003 journal article

Effect of the composition on the electrical properties of TaSixNy metal gate electrodes

IEEE ELECTRON DEVICE LETTERS, 24(7), 439–441.

By: Y. Suh n, G. Heuss n, J. Lee n & V. Misra n 

author keywords: dual metal gates; gate Electrodes; low work function; MOS capacitors; N diffusion; TaSiN
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2003 journal article

Thermal stability of TaSixNy films deposited by reactive sputtering on SiO2

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 150(5), F79–F82.

By: Y. Suh n, G. Heuss n, V. Misra n , D. Park* & K. Limb

Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2002 journal article

Electrical characteristics of TaSixNy/SO2/Si structures by Fowler-Nordheim current analysis

APPLIED PHYSICS LETTERS, 80(8), 1403–1405.

By: Y. Suh n, G. Heuss n & V. Misra n 

Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

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