2004 journal article

Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 22(3), 445–451.

By: D. Niu, R. Ashcraft, C. Hinkle & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Carbonate formation during post-deposition ambient exposure of high-k dielectrics

Applied Physics Letters, 83(17), 3543–3545.

By: T. Gougousi, D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Chemical, physical, and electrical characterizations of oxygen plasma assisted chemical vapor deposited yttrium oxide on silicon

Journal of the Electrochemical Society, 150(5), F102–109.

By: D. Niu, R. Ashcraft, Z. Chen, S. Stemmer & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Electron energy-loss spectroscopy analysis of interface structure of yttrium oxide gate dielectrics on silicon

Applied Physics Letters, 81(4), 676–678.

By: D. Niu, R. Ashcraft, Z. Chen, S. Stemmer & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Elementary reaction schemes for physical and chemical vapor deposition of transition metal oxides on silicon for high-k gate dielectric applications

Journal of Applied Physics, 91(9), 6173–6180.

By: D. Niu, R. Ashcraft, M. Kelly, J. Chambers, T. Klein & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Reactions of Y2O3 films with (001) Si substrates and with polycrystalline Si capping layers

Applied Physics Letters, 81(4), 712–714.

By: S. Stemmer, D. Klenov, Z. Chen, D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Water absorption and interface reactivity of yttrium oxide gate dielectrics on silicon

Applied Physics Letters, 80(19), 3575–3577.

By: D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018