Michael S. Phillips

Loesing, R., Guryanov, G. M., Phillips, M. S., & Griffis, D. P. (2002). Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511. https://doi.org/10.1116/1.1450588