2004 article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.
2004 article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.
2004 article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.
2003 journal article
Optimization of secondary ion mass spectrometry detection limit for N in SiC
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), 1649–1654.
