Works (6)
2004 article
Improved charge neutralization method for depth profiling of bulk insulators using O2+ primary beam on a magnetic sector SIMS instrument
Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, April 29). Applied Surface Science.
2004 article
O2+ versus Cs+ for high depth resolution depth profiling of III–V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, May 13). Applied Surface Science.
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
Gu, C., Pivovarov, A., Garcia, R., Stevie, F., Griffis, D., Moran, J., … Richards, J. F. (2004, January 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, Vol. 22, pp. 350–354.
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, April 29). Applied Surface Science, Vol. 231-232, pp. 663–667.
2004 article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, April 29). Applied Surface Science.
2003 article
Optimization of secondary ion mass spectrometry detection limit for N in SiC
Pivovarov, A. L., Stevie, F. A., Griffis, D. P., & Guryanov, G. M. (2003, July 23). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.