Works (6)
Updated: July 5th, 2023 15:58
2004 article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.
author keywords: charge neutralization; electron gun; magnetic sector
Source: Web Of Science
Added: August 6, 2018
2004 article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.
author keywords: Cs cluster ions; GaN; depth resolution
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.
author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2004 article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.
author keywords: charge neutralization; electron gun; negative secondary ions; magnetic sector
Source: Web Of Science
Added: August 6, 2018
2003 journal article
Optimization of secondary ion mass spectrometry detection limit for N in SiC
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), 1649–1654.
Source: Web Of Science
Added: August 6, 2018
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