Works (5)
Updated: July 5th, 2023 15:58
2006 article
Back side SIMS analysis of hafnium silicate
Gu, C., Stevie, F. A., Bennett, J., Garcia, R., & GriffiS, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7179–7181.
author keywords: SIMS; high-k dielectrics; back side analysis; hafnium silicate
Sources: Web Of Science, ORCID
Added: August 6, 2018
2006 article
SIMS quantification of matrix and impurity species in AlxGa1-xN
Gu, C. J., Stevie, F. A., Hitzman, C. J., Saripalli, Y. N., Johnson, M., & Griffis, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7228–7231.
author keywords: SIMS; aluminum gallium nitride (AlGaN); quantification; calibration curve
Source: Web Of Science
Added: August 6, 2018
2004 article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.
author keywords: Cs cluster ions; GaN; depth resolution
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Sources: Web Of Science, ORCID
Added: August 6, 2018
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.
author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018
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