2006 journal article
Back side SIMS analysis of hafnium silicate
Applied Surface Science, 252(19), 7179–7181.
2006 journal article
SIMS quantification of matrix and impurity species in AlxGa1-xN
Applied Surface Science, 252(19), 7228–7231.
2004 journal article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Applied Surface Science, 231-232(2004 June 15), 684–687.
2004 journal article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.
2004 journal article
Site-specific SIMS backside analysis
Applied Surface Science, 231-232(2004 June 15), 663–667.
