2006 journal article

Back side SIMS analysis of hafnium silicate

Applied Surface Science, 252(19), 7179–7181.

By: C. Gu, F. Stevie, J. Bennett, R. Garcia & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2006 journal article

SIMS quantification of matrix and impurity species in AlxGa1-xN

Applied Surface Science, 252(19), 7228–7231.

By: C. Gu, F. Stevie, C. Hitzman, Y. Saripalli, M. Johnson & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Applied Surface Science, 231-232(2004 June 15), 684–687.

By: M. Kachan, J. Hunter, D. Kouzminov, A. Pivovarov, J. Gu, F. Stevie, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.

By: C. Gu, A. Pivovarov, R. Garcia, F. Stevie, D. Griffis, J. Moran, L. Kulig, J. Richards

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Site-specific SIMS backside analysis

Applied Surface Science, 231-232(2004 June 15), 663–667.

Source: NC State University Libraries
Added: August 6, 2018