2006 article

Back side SIMS analysis of hafnium silicate

Gu, C., Stevie, F. A., Bennett, J., Garcia, R., & GriffiS, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7179–7181.

By: C. Gu, F. Stevie, J. Bennett*, R. Garcia & D. GriffiS

author keywords: SIMS; high-k dielectrics; back side analysis; hafnium silicate
Sources: Web Of Science, ORCID
Added: August 6, 2018

2006 article

SIMS quantification of matrix and impurity species in AlxGa1-xN

Gu, C. J., Stevie, F. A., Hitzman, C. J., Saripalli, Y. N., Johnson, M., & Griffis, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7228–7231.

By: C. Gu, F. Stevie, C. Hitzman*, Y. Saripalli, M. Johnson n & D. Griffis

author keywords: SIMS; aluminum gallium nitride (AlGaN); quantification; calibration curve
Source: Web Of Science
Added: August 6, 2018

2004 article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.

By: M. Kachan n, J. Hunter*, D. Kouzminov*, A. Pivovarov, J. Gu n, F. Stevie, D. Griffis

author keywords: Cs cluster ions; GaN; depth resolution
Source: Web Of Science
Added: August 6, 2018

2004 article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.

By: C. Gu, A. Pivovarov, R. Garcia, F. Stevie, D. Griffis, J. Moran, L. Kulig, J. Richards

Sources: Web Of Science, ORCID
Added: August 6, 2018

2004 article

Site-specific SIMS backside analysis

Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.

author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018