Works (5)

Updated: July 5th, 2023 15:58

2006 article

Back side SIMS analysis of hafnium silicate

Gu, C., Stevie, F. A., Bennett, J., Garcia, R., & GriffiS, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7179–7181.

By: C. Gu n, F. Stevie n, J. Bennett*, R. Garcia n & D. GriffiS n

co-author countries: United States of America 🇺🇸
author keywords: SIMS; high-k dielectrics; back side analysis; hafnium silicate
Sources: Web Of Science, ORCID
Added: August 6, 2018

2006 article

SIMS quantification of matrix and impurity species in AlxGa1-xN

Gu, C. J., Stevie, F. A., Hitzman, C. J., Saripalli, Y. N., Johnson, M., & Griffis, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7228–7231.

By: C. Gu*, F. Stevie*, C. Hitzman, Y. Saripalli*, M. Johnson & D. Griffis*

author keywords: SIMS; aluminum gallium nitride (AlGaN); quantification; calibration curve
Source: Web Of Science
Added: August 6, 2018

2004 article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.

By: M. Kachan, J. Hunter, D. Kouzminov, A. Pivovarov*, J. Gu, F. Stevie*, D. Griffis*

author keywords: Cs cluster ions; GaN; depth resolution
Source: Web Of Science
Added: August 6, 2018

2004 article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.

By: C. Gu n, A. Pivovarov n, R. Garcia n, F. Stevie n, D. Griffis n, J. Moran*, L. Kulig*, J. Richards*

co-author countries: United States of America 🇺🇸
Sources: Web Of Science, ORCID
Added: August 6, 2018

2004 article

Site-specific SIMS backside analysis

Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.

By: C. Gu n, R. Garcia n, A. Pivovarov n, F. Stevie n & D. Griffis n

co-author countries: United States of America 🇺🇸
author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018

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