Kie Jin Park

Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).

Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(3), 978–982.

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

THIN SOLID FILMS, 516(15), 4997–5003.

Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics

LANGMUIR, 23(19), 9844–9849.

In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces

LANGMUIR, 23(11), 6106–6112.

Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

APPLIED PHYSICS LETTERS, 89(4).

Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition

APPLIED PHYSICS LETTERS, 86(5).

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260.