2012 journal article
Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
2008 journal article
Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(3), 978–982.
2008 journal article
Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide
THIN SOLID FILMS, 516(15), 4997–5003.
2007 journal article
Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics
LANGMUIR, 23(19), 9844–9849.
2007 journal article
In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces
LANGMUIR, 23(11), 6106–6112.
2006 journal article
Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures
APPLIED PHYSICS LETTERS, 89(4).
2005 journal article
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition
APPLIED PHYSICS LETTERS, 86(5).
2004 journal article
Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260.