Works (8)

Updated: July 5th, 2023 15:57

2012 journal article

Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).

By: K. Park n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2008 journal article

Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(3), 978–982.

By: Q. Peng n, J. Spagnola n, H. Daisuke n, K. Park n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2008 journal article

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

THIN SOLID FILMS, 516(15), 4997–5003.

By: Q. Peng n, D. Hojo n, K. Park* & G. Parsons n

author keywords: supercritical carbon dioxide (scCO(2)); metal oxides; solvation energy; thermal decomposition; metal diketonates
Sources: Web Of Science, ORCID
Added: August 6, 2018

2007 journal article

Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics

LANGMUIR, 23(19), 9844–9849.

By: G. Hyde n, K. Park n, S. Stewart n, J. Hinestroza n & G. Parsons n

MeSH headings : Aluminum Oxide / chemistry; Cotton Fiber; Microscopy, Electron, Transmission; Nanotechnology; Surface Properties
Sources: Web Of Science, ORCID
Added: August 6, 2018

2007 journal article

In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces

LANGMUIR, 23(11), 6106–6112.

By: K. Park n, D. Terry n, S. Stewart n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2006 journal article

Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

APPLIED PHYSICS LETTERS, 89(4).

By: K. Park n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2005 journal article

Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition

APPLIED PHYSICS LETTERS, 86(5).

By: K. Park n, J. Doub n, T. Gougousi n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2004 journal article

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260.

By: K. Park n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018