2012 journal article

Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 journal article

Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 26(3), 978–982.

Source: NC State University Libraries
Added: August 6, 2018

2008 journal article

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

Thin Solid Films, 516(15), 4997–5003.

By: Q. Peng, D. Hojo, K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 journal article

Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics

Langmuir, 23(19), 9844–9849.

By: G. Hyde, K. Park, S. Stewart, J. Hinestroza & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 journal article

In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces

Langmuir, 23(11), 6106–6112.

By: K. Park, D. Terry, S. Stewart & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2006 journal article

Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

Applied Physics Letters, 89(4).

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2005 journal article

Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition

Applied Physics Letters, 86(5).

By: K. Park, J. Doub, T. Gougousi & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 22(6), 2256–2260.

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018