Works (1)
Updated: July 5th, 2023 15:57
2005 journal article
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition
APPLIED PHYSICS LETTERS, 86(5).
Contributors: K. Park n, n, T. Gougousi n & G. Parsons n
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018