Works (3)
2006 journal article
Influence of oxygen diffusion through capping layers of low work function metal gate electrodes
IEEE ELECTRON DEVICE LETTERS, 27(4), 228–230.
2005 journal article
Electrical characteristics of HfO2 dielectrics with Ru metal gate electrodes
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(9), F138–F141.
2005 journal article
Physical and electrical analysis of RuxYy alloys for gate electrode applications
APPLIED PHYSICS LETTERS, 86(5).