Works (3)

Updated: July 5th, 2023 15:57

2006 journal article

Influence of oxygen diffusion through capping layers of low work function metal gate electrodes

IEEE ELECTRON DEVICE LETTERS, 27(4), 228–230.

By: B. Chen n, R. Jha n, H. Lazar n, N. Biswas n, J. Lee n, B. Lee n, L. Wielunski*, E. Garfunkel*, V. Misra n

co-author countries: United States of America 🇺🇸
author keywords: alloy; capping; effective work function; metal gate; MoTa; oxygen diffusion
Sources: Web Of Science, ORCID
Added: August 6, 2018

2005 journal article

Electrical characteristics of HfO2 dielectrics with Ru metal gate electrodes

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(9), F138–F141.

By: Y. Suh n, H. Lazar n, B. Chen n, J. Lee n & V. Misra n

co-author countries: United States of America 🇺🇸
Sources: Web Of Science, ORCID
Added: August 6, 2018

2005 journal article

Physical and electrical analysis of RuxYy alloys for gate electrode applications

APPLIED PHYSICS LETTERS, 86(5).

By: B. Chen n, Y. Suh n, J. Lee n, J. Gurganus n, V. Misra n & C. Cabral*

co-author countries: United States of America 🇺🇸
Sources: Web Of Science, ORCID
Added: August 6, 2018