2006 journal article

Influence of oxygen diffusion through capping layers of low work function metal gate electrodes

IEEE ELECTRON DEVICE LETTERS, 27(4), 228–230.

By: B. Chen, R. Jha, H. Lazar, N. Biswas, J. Lee, B. Lee, L. Wielunski*, E. Garfunkel*, V. Misra

author keywords: alloy; capping; effective work function; metal gate; MoTa; oxygen diffusion
Sources: Web Of Science, ORCID
Added: August 6, 2018

2005 journal article

Electrical characteristics of HfO2 dielectrics with Ru metal gate electrodes

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(9), F138–F141.

By: Y. Suh, H. Lazar, B. Chen n, J. Lee & V. Misra

Sources: Web Of Science, ORCID
Added: August 6, 2018

2005 journal article

Physical and electrical analysis of RuxYy alloys for gate electrode applications

APPLIED PHYSICS LETTERS, 86(5).

By: B. Chen, Y. Suh, J. Lee, J. Gurganus, V. Misra & C. Cabral

Sources: Web Of Science, ORCID
Added: August 6, 2018