@inproceedings{lucovsky_long_chung_seo_watts_vasic_ulrich_2009, title={Predeposition plasma nitridation process applied to Ge substrates to passivate interfaces between crystalline-Ge substrates and Hf-based high-K dielectrics}, volume={27}, number={1}, booktitle={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Lucovsky, G. and Long, J. P. and Chung, K. B. and Seo, H. and Watts, B. and Vasic, R. and Ulrich, M. D.}, year={2009}, pages={294–299} }
 @article{lee_seo_lucovsky_fleming_ulrich_luening_2008, title={Bulk defects in nano-crystalline and in non-crystalline HfO2-based thin film dielectrics}, volume={517}, ISSN={["0040-6090"]}, DOI={10.1016/j.tsf.2008.08.098}, number={1}, journal={THIN SOLID FILMS}, author={Lee, S. and Seo, H. and Lucovsky, G. and Fleming, L. B. and Ulrich, M. D. and Luening, J.}, year={2008}, month={Nov}, pages={437–440} }
 @article{lee_long_lucovsky_whitten_seo_luning_2008, title={Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices}, volume={48}, ISSN={["0026-2714"]}, DOI={10.1016/j.microrel.2007.07.068}, number={3}, journal={MICROELECTRONICS RELIABILITY}, author={Lee, S. and Long, J. P. and Lucovsky, G. and Whitten, J. L. and Seo, H. and Luning, J.}, year={2008}, month={Mar}, pages={364–369} }
 @article{chung_seo_long_lucovsky_2008, title={Suppression of defect states in HfSiON gate dielectric films on n-type Ge(100) substrates}, volume={93}, ISSN={["0003-6951"]}, DOI={10.1063/1.3005422}, number={18}, journal={APPLIED PHYSICS LETTERS}, author={Chung, K. B. and Seo, H. and Long, J. P. and Lucovsky, G.}, year={2008}, month={Nov} }
 @article{lucovsky_seo_lee_fleming_ulrich_luning_2007, title={Defect reduction by suppression of pi-bonding coupling in nano- and non-crystalline high-(medium)-kappa gate dielectrics}, volume={84}, ISSN={["1873-5568"]}, DOI={10.1016/j.mee.2007.04.062}, number={9-10}, journal={MICROELECTRONIC ENGINEERING}, author={Lucovsky, G. and Seo, H. and Lee, S. and Fleming, L. B. and Ulrich, M. D. and Luning, J.}, year={2007}, pages={2350–2353} }
 @article{lucovsky_seo_lee_fleming_ulrich_luning_lysaght_bersuker_2007, title={Intrinsic electronically active defects in transition metal elemental oxides}, volume={46}, ISSN={["0021-4922"]}, DOI={10.1143/JJAP.46.1899}, number={4B}, journal={JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS}, author={Lucovsky, Gerald and Seo, Hyungtak and Lee, Sanghyun and Fleming, Leslie B. and Ulrich, Marc D. and Luning, Jan and Lysaght, Pat and Bersuker, Gennadi}, year={2007}, month={Apr}, pages={1899–1909} }
 @article{seo_lucovsky_fleming_ulrich_luning_koster_geballe_2007, title={Length scales for coherent pi-bonding interactions in complex high-k oxide dielectrics and their interfaces}, volume={84}, ISSN={["0167-9317"]}, DOI={10.1016/j.mee.2007.04.069}, number={9-10}, journal={MICROELECTRONIC ENGINEERING}, author={Seo, H. and Lucovsky, G. and Fleming, L. B. and Ulrich, M. D. and Luning, J. and Koster, G. and Geballe, T. H.}, year={2007}, pages={2298–2301} }
 @article{lucovsky_luening_fleming_ulrich_rowe_seo_lee_lysaght_bersuker_2007, title={Spectroscopic studies of O-vacancy defects in transition metal oxides}, volume={18}, ISSN={["1573-482X"]}, DOI={10.1007/s10854-007-9192-x}, journal={JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS}, author={Lucovsky, G. and Luening, J. and Fleming, L. B. and Ulrich, M. D. and Rowe, J. E. and Seo, H. and Lee, S. and Lysaght, P. and Bersuker, G.}, year={2007}, month={Oct}, pages={S263–S266} }
 @article{lucovsky_seo_fleming_luening_lysaght_bersuker_2007, title={Studies of bonding defects, and defect state suppression in HfO2 by soft X-ray absorption and photoelectron spectroscopies}, volume={601}, ISSN={["1879-2758"]}, DOI={10.1016/j.susc.2007.04.197}, number={18}, journal={SURFACE SCIENCE}, author={Lucovsky, G. and Seo, H. and Fleming, L. B. and Luening, J. and Lysaght, P. and Bersuker, G.}, year={2007}, month={Sep}, pages={4236–4241} }
 @article{chen_mamouni_zhou_schrimpf_fleetwood_galloway_lee_seo_lucovsky_jun_et al._2007, title={Total dose and bias temperature stress effects for HfSiON on Si MOS capacitors}, volume={54}, ISSN={["0018-9499"]}, DOI={10.1109/TNS.2007.910862}, number={6}, journal={IEEE TRANSACTIONS ON NUCLEAR SCIENCE}, author={Chen, D. K. and Mamouni, E. E. and Zhou, X. J. and Schrimpf, R. D. and Fleetwood, D. M. and Galloway, K. F. and Lee, S. and Seo, H. and Lucovsky, G. and Jun, B. and et al.}, year={2007}, month={Dec}, pages={1931–1937} }
 @article{lucovsky_hinkle_fulton_stoute_seo_luning_2006, title={Intrinsic nanocrystalline grain-boundary and oxygen atom vacancy defects in ZrO2 and HfO2}, volume={75}, ISSN={["0969-806X"]}, DOI={10.1016/j.radphyschem.2005.07.062}, number={11}, journal={RADIATION PHYSICS AND CHEMISTRY}, author={Lucovsky, G. and Hinkle, C. L. and Fulton, C. C. and Stoute, N. A. and Seo, H. and Luning, J.}, year={2006}, month={Nov}, pages={2097–2101} }
 @article{lucovsky_fulton_ju_stoute_tao_aspnes_luening_2006, title={Suppression of Jahn-Teller term-split band edge states in the x-ray absorption spectra of non-crystalline Zr silicates and Si oxynitride alloys, and alloys of ZrO2 with Y2O3}, volume={75}, ISSN={["0969-806X"]}, DOI={10.1016/j.radphyschem.2006.05.004}, number={11}, journal={RADIATION PHYSICS AND CHEMISTRY}, author={Lucovsky, G. and Fulton, C. C. and Ju, B. S. and Stoute, N. A. and Tao, S. and Aspnes, D. E. and Luening, J.}, year={2006}, month={Nov}, pages={1591–1595} }
 @article{seo_kim_chung_kim_kim_jeon_2005, title={Characterization of remote inductively coupled CH4-N-2 plasma for carbon nitride thin-film deposition}, volume={98}, number={4}, journal={Journal of Applied Physics}, author={Seo, H. and Kim, J. H. and Chung, K. H. and Kim, J. Y. and Kim, S. H. and Jeon, H.}, year={2005} }
 @article{kim_kim_seo_kim_jeon_2005, title={Deposition and plasma measurements of Zr-oxide films with low impurity concentrations by remote PEALD}, volume={8}, ISSN={["1944-8775"]}, DOI={10.1149/1.1854773}, number={3}, journal={ELECTROCHEMICAL AND SOLID STATE LETTERS}, author={Kim, JY and Kim, SH and Seo, H and Kim, JH and Jeon, H}, year={2005}, pages={G82–G84} }
 @article{kim_seo_kim_kim_tak_jeon_2005, title={Surface characteristics of indium-tin oxide cleaned by remote plasma}, volume={44}, number={2}, journal={Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers}, author={Kim, S. and Seo, H. and Kim, Y. and Kim, K. and Tak, Y. and Jeon, H.}, year={2005}, pages={1041–1044} }