Works (3)
2007 article
Uniformity analysis of wafer scale sub-25 nm wide nanowire array nanoimprint mold fabricated by PEDAL process
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 1523–1527.
2006 journal article
Deterministic nanowire fanout and interconnect without any critical translational alignment
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 5(4), 356–361.
2005 journal article
Fabrication of wafer scale, aligned sub-25 nm nanowire and nanowire templates using planar edge defined alternate layer process
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 28(2), 107–114.