Works (3)
2007 article
Uniformity analysis of wafer scale sub-25nm wide nanowire array nanoimprint mold fabricated by PEDAL process
Sonkusale, S. R., Spigna, N. H. D., & Franzon, P. D. (2007, February 10). Microelectronic Engineering, Vol. 84, pp. 1523–1527.
2006 article
Deterministic nanowire fanout and interconnect without any critical translational alignment
Spigna, N. H. D., Nackashi, D. P., Amsinck, C. J., Sonkusale, S. R., & Franzon, P. D. (2006, July 1). IEEE Transactions on Nanotechnology, Vol. 5, pp. 356–361.
2005 article
Fabrication of wafer scale, aligned sub-25nm nanowire and nanowire templates using planar edge defined alternate layer process
Sonkusale, S. R., Amsinck, C. J., Nackashi, D. P., Spigna, N. H. D., Barlage, D., Johnson, M., & Franzon, P. D. (2005, May 11). Physica E Low-Dimensional Systems and Nanostructures, Vol. 28, pp. 107–114.