2007 article

Uniformity analysis of wafer scale sub-25nm wide nanowire array nanoimprint mold fabricated by PEDAL process

Sonkusale, S. R., Spigna, N. H. D., & Franzon, P. D. (2007, February 10). Microelectronic Engineering, Vol. 84, pp. 1523–1527.

By: S. Sonkusale n, N. Spigna n & P. Franzon n

author keywords: PEDAL; nanoimprint; mold; nanowires
topics (OpenAlex): Nanofabrication and Lithography Techniques; Nanowire Synthesis and Applications; Advancements in Photolithography Techniques
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2006 article

Deterministic nanowire fanout and interconnect without any critical translational alignment

Spigna, N. H. D., Nackashi, D. P., Amsinck, C. J., Sonkusale, S. R., & Franzon, P. D. (2006, July 1). IEEE Transactions on Nanotechnology, Vol. 5, pp. 356–361.

By: N. Spigna n, D. Nackashi n, C. Amsinck n, S. Sonkusale n & P. Franzon n

author keywords: alignment; crossbar architectures; fanout; interconnect; nanoscale interfacing; nanotechnology
topics (OpenAlex): Nanofabrication and Lithography Techniques; Nanowire Synthesis and Applications; Force Microscopy Techniques and Applications
TL;DR: A design is presented that allows complete and deterministic fanout of regular arrays of wires from the nano- to the microworld without the need for any critical translational alignment steps. (via Semantic Scholar)
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2005 article

Fabrication of wafer scale, aligned sub-25nm nanowire and nanowire templates using planar edge defined alternate layer process

Sonkusale, S. R., Amsinck, C. J., Nackashi, D. P., Spigna, N. H. D., Barlage, D., Johnson, M., & Franzon, P. D. (2005, May 11). Physica E Low-Dimensional Systems and Nanostructures, Vol. 28, pp. 107–114.

By: S. Sonkusale n, C. Amsinck n, D. Nackashi n, N. Spigna n, D. Barlage n, M. Johnson n, P. Franzon n

author keywords: nanowire; nanoimprinting; mold; template; interconnects; nanotechnology
topics (OpenAlex): Nanofabrication and Lithography Techniques; Nanowire Synthesis and Applications; Anodic Oxide Films and Nanostructures
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

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