1997 journal article
ION Implantation of epitaxial GaN films: damage, doping and activation
Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 127(1997 May), 463–466.
By: N. Parikh, A. Suvkhanov, M. Lioubtchenko, E. Carlson, M. Bremser, D. Bray, R. Davis, J. Hunn
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