Works (1)
1997 article
Ion implantation of epitaxial GaN films: damage, doping and activation
Parikh, N., Suvkhanov, A., Lioubtchenko, M., Carlson, E., Bremser, M., Bray, D., … Hunn, J. (1997, May 1). Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms.