Monalisa Bora

Lu, G. Q., Bora, M., Tedder, L. L., & Rubloff, G. W. (1998). Integrated dynamic simulation of rapid thermal chemical vapor deposition of polysilicon. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 11(1), 63–74. https://doi.org/10.1109/66.661286

Lu, G. Q., Bora, M., & Rubloff, G. W. (1997). Polysilicon RTCVD process optimization for environmentally-conscious manufacturing. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 10(3), 390–398. https://doi.org/10.1109/66.618212